We present the paper/polymer/foil-based MEMS capacitive pressure sensors for various applications. In this poster, cantilever, normal mode with different diaphragm shape, touch mode and double touch mode capacitive pressure sensor. The capacitive pressure sensor of lowest aspect ratio (w/L) has maximum sensitivity and lowest resonant frequency. Among different shape of diaphragm the circle shape sensor has maximum sensitivity however it has maximum non-linearity. In touch and double mode capacitive pressure sensor, the diaphragm touches bottom plate due to which the sensor shows linear response.
Rishabh B. Mishra
Shubham Mante
Aftab M. Hussain
Paper and Do-it-yourself (DIY) electronics.
Design criteria, mathematical modelling, Finite element modelling, DIY fabrication and Characterisation.
Some part of works are completed and published however study of mechanics of material is still in progress.
Ultra low (acoustic) and high pressure (air-flow) monitoring.